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AERA Product

반도체, LCD, Solar, 기타 진공장비 및 실험실, 학교연구소 등 다양한 분야에 걸쳐 MFC 관련 기술지원 및 합리적인 가격으로 Total Solution 을 제공합니다.



FC-770 Series Specification
Model Series
 FC-770 Series
Full Scale Range

5~5000 SCCM
5~50 SLM / 50~200 SLM
Interface
 Analog
Control Range
 2~100% of full scale
Valve ,Seal Type
 Solenoid Normally Close & Open / Viton
Response Time
 2 Seconds
Accuracy
 Within ± 1% of full scale
Linearity
 Within ± 0.5% of full scale
Repeatability
 Within ± 0.2% of full scale
Leak Integrity
 1×10-7 Paㆍm3/sec(He)
Normal Operating Pressure
 40 PSI 276 kpa
Proof Pressure
 150 PSI 981kpa Max
Tempereture Range
 5~50 ℃
command & Output Signal
 0~5VDC
Input Power
 ±15 VDC (±2%)
Power Consumption
 3.1 Watts Max
Fitting
 1/4",3/8" VCR,Swagelock
Materials
 SUS316L Viton Teflon
사용분야
 LCD, Solar, 연구소, 실험실, 기타 진공장비

 

FC-780 Series Specification
Model Series
 FC-780 Series
Full Scale Range

5~5000 SCCM
5~50 SLM / 50~200 SLM
Interface
 Analog
Control Range
 2~100% of full scale
Valve ,Seal Type
 Solenoid Normally Close & Open / Metal
Response Time
 1 Seconds
Accuracy
 Within ± 1% of full scale
Linearity
 Within ± 0.5% of full scale
Repeatability
 Within ± 0.2% of full scale
Leak Integrity
 1×10-11 Paㆍm3/sec(He)
Normal Operating Pressure
 40 PSI 276 kpa
Proof Pressure
 150 PSI 981kpa Max
Tempereture Range
 5~50 ℃
command & Output Signal
 0~5VDC
Input Power
 ±15 VDC (±2%)
Power Consumption
 3.1 Watts Max
Fitting
 1/4",3/8" VCR,Swagelock
Materials
 SUS316L Teflon
사용분야
 반도체, LCD, Solar, 기타 진공장비

 

FC-D980 Series Specification
Model Series
 FC-D980 Series
Full Scale Range

5~5000 SCCM
5~50 SLM
Interface
 Digital / Analog
Control Range
 2~100% of full scale
Valve ,Seal Type
 Piezo Normally Close & Open / Metal
Response Time
 1 Seconds
Accuracy
 Within ± 1% of Set point
Linearity
 Within ± 0.5% of full scale
Repeatability
 Within ± 0.2% of full scale
Leak Integrity
 1×10-11 Paㆍm3/sec(He)
Normal Operating Pressure
 40 PSI 276 kpa
Proof Pressure
 150 PSI 981kpa Max
Tempereture Range
 5~50 ℃
command & Output Signal
 0~5VDC
Input Power
 ±15 VDC (±2%)
Power Consumption
 3.1 Watts Max
Fitting
 1/4" VCR
Materials
 Double VAR SUS 316L
사용분야
 반도체, LCD, Solar, 공정용장비

 

FC-PA780 Series Specification
Model Series
 FC-PA780 Series
Full Scale Range

5~5000 SCCM
5~50 SLM / 50~200 SLM
Interface
 Digital / Analog
Control Range
 2~100% of full scale
Valve ,Seal Type
 Solenoid Normally Close & Open / Metal
Response Time
 1 Seconds
Accuracy
 Within ± 1% of Set point
Linearity
 Within ± 0.5% of full scale
Repeatability
 Within ± 0.2% of full scale
Leak Integrity
 1×10-11 Paㆍm3/sec(He)
Normal Operating Pressure
 40 PSI 276 kpa
Proof Pressure
 150 PSI 981kpa Max
Tempereture Range
 5~50 ℃
command & Output Signal
 0~5VDC
Input Power
 ±15 VDC (±2%)
Power Consumption
 3.1 Watts Max
Fitting
 1/4" VCR
Materials
 SUS316L Teflon
사용분야
 반도체, LCD, Solar, 공정용 장비

 

대유량 MFC
Model
FC-773C
FC-773C Specification
 다운로드
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